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Beilstein J. Nanotechnol. 2021, 12, 1151–1172, doi:10.3762/bjnano.12.86
Figure 1: Atomistic IDMD-based simulation protocol of the FEBID process by means of MBN Explorer [19] and MBN Stu...
Figure 2: Side view of an optimized single Pt(PF3)4 molecule adsorbed on a SiO2-H substrate. The energy minim...
Figure 3: (A) Total electron impact fragmentation cross section of Pt(PF3)4 including DEA and DI contribution...
Figure 4: A snapshot of the multiscale IDMD simulation of a FEBID process using Pt(PF3)4 at the end of the 20...
Figure 5: The number of Pt atoms (full spheres) and the total number of atoms including ligands (open spheres...
Figure 6: A snapshot of the IDMD simulation of the FEBID process of Pt(PF3)4 in the regime of Edep = 300 kcal...
Figure 7: Evolution of the largest cluster in the course of simulation at the end of each FEBID simulation cy...
Figure 8: (A) Size distribution of Pt clusters during the first seven FEBID cycles. (B) Difference of size di...
Figure 9: Double-log plot of the number of Pt atoms N in the deposited clusters as function of the radius R o...
Figure 10: Distribution of the circumvented diameters d of the deposited Pt clusters after several cycles of t...
Figure 11: (A) The atomic content of the deposited nanostructure is analyzed by splitting the nanostructure in...
Figure 12: Evolution of the height of the grown Pt-containing structure at different FEBID simulation cycles f...